APPARATUS FOR INSPECTING OBJECT'S DENSE LAYER UNDER TEST, PARTICULARLY FUEL CELL'S ELECTROLYTE LAYER AND METHOD HAVING THE SAME

摘要

PURPOSE: A device for inspecting a subject compact layer and an inspection method using the same are provided to cause a subject compact layer to be in a vacuum state and inject helium gas, thereby determining whether the subject compact layer is cracked or not by the pressure change of inspection gas. CONSTITUTION: A device for inspecting a subject compact layer includes a subject accommodation unit (70), a subject inspection unit (40), and a vacuum formation unit (20). The subject accommodation unit accommodates the subject including a compact layer substrate. The subject inspection unit is connected with the subject accommodation unit, and at least includes a pressure measurement sensor (49) so as to determine the compact layer is abnormal or not through the pressure change of the inspection gas supplied to the subject accommodation unit. The vacuum formation unit is connected with the subject accommodation unit, and has the subject accommodation unit to be in a vacuum state.