A SEMICONDUCTOR DEVICE ARRANGEMENT, A METHOD OF ANALYSING A PERFORMANCE OF A FUNCTIONAL CIRCUIT ON A SEMICONDUCTOR DEVICE AND A DEVICE ANALYSIS SYSTEM

摘要

A semiconductor device arrangement (1 ) comprising a functional circuit (10) comprising a plurality of timing components (20, 21, 22) and a reference module (30) comprising a plurality of reference components (40, 41, 42) is described. Each reference component (40) comprises a reference timing component (50) corresponding to a timing component of the plurality of timing components and a controllable timing component (52). The controllable timing component is arranged to provide a delay in dependence on an applied light stimulus. A method (100) of analysing a performance of a functional circuit on a semiconductor device is described. The method comprises providing (1 10) said semiconductor device arrangement; inspecting (130) the functional circuit during operation to identify a critical timing path and to identify at least one of the plurality timing components as a critical timing component on the critical timing path; identifying (140) one of the plurality of reference components to correspond to the critical timing component as a representative reference component; applying (160) a plurality of light stimuli to the representative reference component while operating the representative reference component; and determining (170) a timing behaviour of the representative reference component in dependence on the reference operating condition and the plurality of light stimuli. A device analysis system (80) for analysing a functional circuit comprising a plurality of timing components is described.