A METHOD AND SYSTEM (10) FOR CLEANING A SURFACE, HAVING PARTICULATE MATTER THEREON, OF A SUBSTRATE FEATURES IMPINGING UPON THE SURFACE OF A JET (108) OF A LIQUID HAVING COUPLING ELEMENTS (94) ENTRAINED THEREIN. A SUFFICIENT DRAG FORCE IS IMPARTED UPON THE COUPLING ELEMENTS TO HAVE THE SAME MOVE WITH RESPECT TO THE LIQUID AND CAUSE THE PARTICULATE MATTER TO MOVE WITH RESPECT TO THE SUBSTRATE.
申请公布号
MY149895(A)
申请公布日期
2013.10.31
申请号
MY2008PI02420
申请日期
2006.12.18
申请人
LAM RESEARCH CORPORATION
发明人
FREER, ERIK, M.;DELARIOS, JOHN M.;MIKHAYLICHENKO, KATRINA;RAVKIN, MICHAEL;KOROLIK, MIKHAIL;REDEKER, FRITZ C.