SILICA GLASS CONTAINING TiO2, AND PROCESS FOR PRODUCTION OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a silica glass containing TiO, whose thermal expansion coefficient is nearly zero in the broad temperature range.SOLUTION: A silica glass containing TiOhas a virtual temperature of ≤1,000°C, an OH concentration of ≤600 ppm, a thermal expansion coefficient in -50 to 150°C of 0±200 ppb, and a variation in the virtual temperature of ≤70°C.