摘要 |
PROBLEM TO BE SOLVED: To solve a problem that there is a limitation on changes of the heating amount, the temperature gradient, and the heating pattern in a conventional planar heater.SOLUTION: In this invention, multiple planar heater elements, each of which is formed by disposing one or multiple heating bodies on an insulation material, are laminated in a vertical direction to form a multilayer planar heater. The heating bodies in the multiple planar heater elements are wave shaped belt like heating bodies and have different widths of the belt like heating bodies and different pitches of the wave shapes. The heating bodies are disposed on one surface of the insulation material of the planar heater element and a power source terminal extraction part region of the heating bodies is formed on the other surface. |