发明名称 |
DYNAMIC MULTI-PURPOSE COMPOSITION FOR THE REMOVAL OF PHOTORESISTS AND METHOD FOR ITS USE |
摘要 |
Improved dry stripper solutions for removing one, two or more photoresist layers from substrates are provided. The stripper solutions comprise dimethyl sulfoxide, a quaternary ammonium hydroxide, and an alkanolamine, an optional secondary solvent and less than about 3 wt.% water and/or a dryness coefficient of at least about 1. Methods for the preparation and use of the improved dry stripping solutions are additionally provided. |
申请公布号 |
EP2657770(A1) |
申请公布日期 |
2013.10.30 |
申请号 |
EP20130003729 |
申请日期 |
2006.10.24 |
申请人 |
DYNALOY, LLC |
发明人 |
PHENIS, MICHAEL, T.;JOHNSON, LAURI RENEE;CHAN, RAYMOND;SCHEELE, DIANE, MARIE;POLLARD, KIMBERLY, DONA;GOEBEL, GENE |
分类号 |
G03F7/42;C11D3/26;C11D3/30;C11D3/43;C11D7/32;C11D11/00 |
主分类号 |
G03F7/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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