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经营范围
发明名称
CMP PAD CONDITIONING TOOL
摘要
申请公布号
EP2655015(A2)
申请公布日期
2013.10.30
申请号
EP20110832158
申请日期
2011.12.20
申请人
DIAMOND INNOVATIONS, INC.
发明人
RULAND, GARY, E.;RAREY, CHARLES;EASLEY, THOMAS, CHARLES;GRAHAM, JAMES;SCHWEIZER, MARK
分类号
B24D18/00;B24B53/017;B24D3/06;B24D3/34;B24D7/02
主分类号
B24D18/00
代理机构
代理人
主权项
地址
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