发明名称 |
Method of production of a field effect transistor with local source/drain insulation |
摘要 |
Field effect transistor comprises a semiconductor substrate (1), a source recess (SV) and a drain recess (DV) formed in the substrate, a recessed insulating layer (VI) formed in the base region of the source and drain recess, an electrically conducting filler layer (F) formed on the surface of the insulating layer, a gate dielectric (3) formed on the substrate surface between the source and drain recesses, and a gate layer (4) formed on the surface of the gate dielectric. An independent claim is also included for a process for the production of a field effect transistor. |
申请公布号 |
EP2657961(A1) |
申请公布日期 |
2013.10.30 |
申请号 |
EP20130177706 |
申请日期 |
2003.09.19 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
HOLZ, JUERGEN;SCHRUEFER, KLAUS;TEWS, HELMUT |
分类号 |
H01L21/336;H01L29/06;H01L29/417;H01L29/66;H01L29/78 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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