FLOTING ROLLER APPARATUS FOR TRANSFERING GLASS SUBSTRATE

摘要

PURPOSE: A floating roller apparatus for transferring a glass substrate is provided to minimize the deformation of a transferring unit inside a chamber in order to transfer a glass substrate or a tray on which the glass substrate is placed even if the chamber is deformed by vacuum pressure inside the chamber. CONSTITUTION: A floating roller apparatus (10) for transferring a glass substrate includes a transferring unit (100), a guide part, and a spring (300). The transferring unit inside a chamber (20) transfers a glass substrate loaded inside the chamber or a tray on which the glass substrate is placed. The guide part guides the transferring unit so that the transferring unit moves in a width direction perpendicular to the transferring direction of the glass substrate. The spring provides the transferring unit with an elastic force so that the transferring unit guided by the guide part returns to an initial position. A pair of the transferring units at both sides inside the chamber is placed along the transferring direction of the glass substrate side by side. Multiple rollers (120) for transferring the tray on which the glass substrate is placed are longitudinally arranged at the supporting member (110) of the transferring unit. The guide part includes a fixing member and a first guide module (220).