| 摘要 |
PROBLEM TO BE SOLVED: To prevent hooking at the beginning of coating with a spiral spray. SOLUTION: A liquid coater 1 for coating a substrate with a liquid has a liquid discharge hole 15, two or more air spraying holes 17 formed around the liquid discharge hole and spraying compressed air in such a way as to make the compressed air nearly in contact with the outer periphery of the beads of the liquid discharged from the liquid discharge hole, a valve 31 carrying out starting and stopping of the discharge of the liquid from the liquid discharge hole, a pressure switching device 50 switching the pressure of the compressed air sprayed from the air spraying holes between the first pressure and the second pressure higher than the first pressure, and a controller 63 controlling the pressure switching device so as to spray compressed air at the first pressure during stopping of the discharge of the liquid and to spray compressed air at the second pressure at the same time as the beginning of the discharge of the liquid or a specified time after the beginning of the discharge of the liquid. COPYRIGHT: (C)2009,JPO&INPIT
|
