发明名称 |
A METHOD FOR PROVIDING AN ECPR MASTER ELECTRODE |
摘要 |
<p>A method for providing a topographical pattern on a conducting or semiconducting carrier element of an ECPR master electrode is provided. The method comprises the steps of providing an etch mask on a front side of said carrier element; and etching said front side of said carrier element according to an reactive ion etch sequence, wherein said sequence comprises i) etching a first part of a trench of said carrier element using a predetermined set of constant etch parameters, and ii) etching a second part of said trench using a repeated cycle of a predetermined set of alternating etch parameters.</p> |
申请公布号 |
EP2655701(A1) |
申请公布日期 |
2013.10.30 |
申请号 |
EP20100795732 |
申请日期 |
2010.12.23 |
申请人 |
CENTRE DE RECHERCHE PUBLIC - GABRIEL LIPPMANN |
发明人 |
DAINESE, MATTEO;CUTHBERTSON, ALAN;FREDENBERG, MIKAEL;MOELLER, PATRIK;VAN DEN HOEK, WILBERT;ARONSSON, CECILIA |
分类号 |
C25D5/02;C25D7/12;H01L21/288;H01L21/3065 |
主分类号 |
C25D5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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