| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction apparatus for reliably sucking an object without causing creases. SOLUTION: The suction apparatus includes: a box-shaped mounting base 11 that includes multiple air intake holes 22 formed in the upper surface 21 thereof and is configured so that a circuit substrate 100 is placed on the upper surface 21; a sucking mechanism 12 that sucks air from the interior space of the mounting base 11; and a control section that controls the sucking mechanism 12 so as to suck air from the interior space, thereby executing sucking operation in which the circuit substrate 100 placed on the upper surface 21 is sucked onto the upper surface 21. The mounting base 11 is configured to have multiple compartments (31a-31d) that are formed by dividing the interior space and are arranged side by side along the upper surface 21. The sucking mechanism 12 is configured to suck air from the respective compartments individually. The control section, in sucking operation, controls the sucking mechanism 12 so as to gradually increase the number of compartments from which air is sucked, thereby gradually increasing the sucked area of the circuit substrate 100 to be sucked onto the upper surface 21. COPYRIGHT: (C)2010,JPO&INPIT |
