发明名称 |
Acoustic transducers with perforated membranes |
摘要 |
A MEMS device, such as a microphone, uses a perforated plate. The plate comprises an array of holes across the plate area. The plate has an area formed as a grid of polygonal cells, wherein each cell comprises a line of material following a path around the polygon thereby defining an opening in the centre. In one aspect, the line of material forms a path along each side of the polygon which forms a track which extends at least once inwardly from the polygon perimeter towards the centre of the polygon and back outwardly to the polygon perimeter. This defines a meandering hexagon side wall, which functions as a local spring suspension. |
申请公布号 |
EP2658288(A1) |
申请公布日期 |
2013.10.30 |
申请号 |
EP20120166028 |
申请日期 |
2012.04.27 |
申请人 |
NXP B.V. |
发明人 |
REIMANN, KLAUS;BOMINAAR-SILKENS, IRIS;VAN LIPPEN, TWAN;PIJNENBURG, REMCO HENRICUS WILHELMUS |
分类号 |
H04R19/00;G01P15/125;H01H59/00;H04R19/04 |
主分类号 |
H04R19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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