发明名称
摘要 Disclosed is an acoustic wave element wherein power durability of an IDT electrode can be increased without significant increase to electrical resistance. An acoustic wave element (1) is provided with IDT electrodes (3) atop a piezoelectric substrate (2), each IDT electrode (3) containing a main component metal and a sub component metal which increases power durability more than the main component metal, and comprising, in a thickness direction of the IDT electrode, one concentration changing portion (3b) wherein a concentration gradient is provided so that concentration of the sub metal component is relatively higher on the piezoelectric substrate (2) side and lower toward a direction away from the piezoelectric substrate (2).
申请公布号 JP5327336(B2) 申请公布日期 2013.10.30
申请号 JP20110540487 申请日期 2010.11.05
申请人 发明人
分类号 H03H9/145;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H03H3/08 主分类号 H03H9/145
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