发明名称 Device for position detection
摘要 An apparatus for position finding, including a light source to produce a wave field in a measurement section, a wave field variation device to generate a variation of a wavelength of the wave field over time, an interferometer to produce an interference pattern for the wave field which is dependent on the length of the measurement section, a detector to produce a measurement signal on the basis of the detected interference pattern, and an evaluation circuit to evaluate the measurement signal on the basis of the variation over time.
申请公布号 US8570529(B2) 申请公布日期 2013.10.29
申请号 US20100662159 申请日期 2010.04.01
申请人 KARRAI KHALED;ATTOCUBE SYSTEMS AG 发明人 KARRAI KHALED
分类号 G01B9/02 主分类号 G01B9/02
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