| 摘要 |
A cassette mounting apparatus is provided to prevent excessive impacts from applied to a cassette in a process of mounting the cassette in a mount unit or dropping the cassette, thereby preventing damage of a substrate and impurities in a guide. A vertical moving unit vertically moves as supporting a cassette. A horizontal moving unit positions the cassette by horizontally moving the cassette. The vertical moving unit comprises a first pinion(52), and a first rack bar(32). In the first rack bar, a saw tooth engaged with the first pinion is formed. The first rack bar vertically moves by loads of the cassette. The horizontal moving unit comprises a second pinion(54), and a second rack bar(34). In the second rack bar, a saw tooth engaged with the second pinion is formed. The second rack bar horizontally moves in parallel to an upper surface of an equipment port(20). The second rack bar further comprises a guide(38) for aligning the cassette by horizontally moving the cassette. |
