| 摘要 |
A deposition apparatus including a revolver is provided to reduce the time of a deposition time and thus increase a yield by quickly depositing a deposition material on a substrate within a unit time. A body(101) has at least one deposition source(303), and deposition opening members(404d1,404d4) corresponding to a preheating region(P4), a deposition region(P1) and a standby region(P2) and deposition closing member(404d2,404d3) are positioned over the body. A revolver(302) has a rotary cover(404) so that a deposition material filled in any one of the deposition sources which is positioned corresponding to the deposition opening member and the deposition closing member, and when the deposition material is exhausted, the cover is rotated. |
