LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD.
摘要
申请公布号
NL2010565(A)
申请公布日期
2013.10.29
申请号
NL20132010565
申请日期
2013.04.03
申请人
ASML NETHERLANDS B.V.
发明人
GROOT ANTONIUS FRANCISCUS;BROERS SANDER CHRISTIAAN;CADEE THEODORUS PETRUS MARIA;HOOGENDAM CHRISTIAAN ALEXANDER;HUANG YANG-SHAN;BOEIJ JEROEN;LOOPSTRA ERIK ROELOF;VERMEULEN JOHANNES PETRUS MARTINUS;VEN BASTIAAN LAMBERTUS
