发明名称 Methods for forming a semiconductor structure
摘要 Methods of forming a Ni material on a bond pad are disclosed. The methods include forming a dielectric material over a bond pad, forming an opening within the dielectric material to expose the bond pad, curing the dielectric material to form a surface of the dielectric material having a steep curvilinear profile, and forming a nickel material over the at least one bond pad. The dielectric material having a steep curvilinear profile may be formed by altering at least one of a curing process of the dielectric material and a thickness of the dielectric material. The dielectric material may be used to form a relatively thick Ni material on bond pads smaller than about 50 mum. Semiconductor structures formed by such methods are also disclosed.
申请公布号 US8569167(B2) 申请公布日期 2013.10.29
申请号 US201113074852 申请日期 2011.03.29
申请人 GHANDI JASPREET S.;YATES DON L.;SUN YANGYANG;MICRON TECHNOLOGY, INC. 发明人 GHANDI JASPREET S.;YATES DON L.;SUN YANGYANG
分类号 H01L21/4763 主分类号 H01L21/4763
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