发明名称 Optical system polarizer calibration
摘要 A method to calibrate a polarizer in polarized optical system at any angle of incidence, by decoupling the calibration from a polarization effect of the system, by providing a calibration apparatus that includes a substrate having a polarizer disposed on a surface thereof, with an indicator on the substrate for indicating a polarization orientation of the polarizer, loading the calibration apparatus in the polarized optical system with the indicator in a desired position, determining an initial angle between the polarization orientation and a reference of the polarized optical system, acquiring spectra using the polarized optical system at a plurality of known angles between the polarization orientation and the reference of the polarized optical system, using the spectra to plot a curve indicating an angle of the polarizer in the polarized optical system, and when the angle of the polarizer is outside of a desired range, adjusting the angle of the polarizer, and repeating the steps of acquiring the spectra, and plotting a curve indicating the angle of the polarizer.
申请公布号 US8570514(B2) 申请公布日期 2013.10.29
申请号 US201113164130 申请日期 2011.06.20
申请人 DE VEER JOHANNES D.;POSLAVSKY LEONID;ZHUANG GUORONG V.;KRISHNAN SHANKAR;KLA-TENCOR CORPORATION 发明人 DE VEER JOHANNES D.;POSLAVSKY LEONID;ZHUANG GUORONG V.;KRISHNAN SHANKAR
分类号 G01J4/00 主分类号 G01J4/00
代理机构 代理人
主权项
地址