发明名称 |
Position measuring device |
摘要 |
A position measuring device including a reflective scale and a scanning unit. The scanning unit includes a retroreflector and a signal unit wherein the signal unit includes a light source and a detector arrangement. The scanning unit and the signal unit are structurally separate from one another and are disposed in planes parallel to one another, and wherein the scanning unit is movable relative to the reflective scale in a measuring direction. The light source emits a beam that propagates freely in a direction to the scanning unit, wherein from the scanning unit along the direction to the signal unit a pair of interfering partial beams propagate freely and wherein between the signal unit and the scanning unit the partial beams propagate freely in a propagation direction that is oriented perpendicular to the planes.
|
申请公布号 |
US8570533(B2) |
申请公布日期 |
2013.10.29 |
申请号 |
US201213476113 |
申请日期 |
2012.05.21 |
申请人 |
GARCZAREK FLORIAN;HOLZAPFEL WOLFGANG;DR. JOHANNES HEIDENHAIN GMBH |
发明人 |
GARCZAREK FLORIAN;HOLZAPFEL WOLFGANG |
分类号 |
G01B11/14 |
主分类号 |
G01B11/14 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|