发明名称 Transmitting optical element and objective for a microlithographic projection exposure apparatus
摘要 A transmitting optical element adapted for use in an objective for a microlithographic projection exposure apparatus is composed of a polycrystalline material, with the polycrystalline material having crystallites with a cubic crystal structure, and with the mean crystallite size of these crystallites being at least micrometers, and at most micrometers.
申请公布号 US8570488(B2) 申请公布日期 2013.10.29
申请号 US20050718146 申请日期 2005.12.08
申请人 CLAUSS WILFRIED;TOTZECK MICHAEL;RISSMANN GISELA;CARL ZEISS SMT GMBH 发明人 CLAUSS WILFRIED;TOTZECK MICHAEL;MUELLER-RISSMANN WERNER
分类号 G03B27/52 主分类号 G03B27/52
代理机构 代理人
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