| 摘要 |
PURPOSE: A nanoparticle manufacturing device is provided to stop the nanoparticle from being agglomerated in the inside or adhered to the inside wall of a chamber by cooling the wall of the chamber and the nanoparticle which flows into a baffle side. CONSTITUTION: A nanoparticle manufacturing device comprises: a chamber (100), an insulation tube (200), a plasma antenna portion (300), the variable location part (400), a baffle (500) and an exhausting part (600). A stage in which a substrate is mounted is arranged in the chamber. A process area is formed inside of the insulation tube. The process area is connected to the inside of the chamber. The plasma antenna portion is formed to surround the insulation tube, and a magnetic field is formed. The variable location part changes the position to form the magnetic field in an external periphery of the insulation tube. The baffle is installed between the chamber and the insulation tube. A particle of a process gas which is disassembled with the plasma is passed through to the chamber side. The exhausting part exhausts and collects the particle of predetermined amount. |
