发明名称 Semiconductor device and manufacturing method thereof
摘要 According to one embodiment, a semiconductor device includes a semiconductor region, a tunnel insulating film provided on the semiconductor region, a charge storage insulating film provided on the tunnel insulating film and having a hafnium oxide including a cubic region, a block insulating film provided on the charge storage insulating film, and a control gate electrode provided on the block insulating film.
申请公布号 US8569823(B2) 申请公布日期 2013.10.29
申请号 US201113235970 申请日期 2011.09.19
申请人 INO TSUNEHIRO;SHINGU MASAO;FUJII SHOSUKE;TAKASHIMA AKIRA;MATSUSHITA DAISUKE;FUJIKI JUN;YASUDA NAOKI;NAKASAKI YASUSHI;MURAOKA KOICHI;KABUSHIKI KAISHA TOSHIBA 发明人 INO TSUNEHIRO;SHINGU MASAO;FUJII SHOSUKE;TAKASHIMA AKIRA;MATSUSHITA DAISUKE;FUJIKI JUN;YASUDA NAOKI;NAKASAKI YASUSHI;MURAOKA KOICHI
分类号 H01L29/788 主分类号 H01L29/788
代理机构 代理人
主权项
地址