| 发明名称 |
Integrated MEMS device and method of use |
| 摘要 |
An integrated MEMS device is disclosed. The system comprises a MEMS resonator; and a MEMS device coupled to a MEMS resonator. The MEMS resonator and MEMS device are fabricated on a common substrate so that certain characteristics of the MEM resonator and MEMS device track each other as operating conditions vary.
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| 申请公布号 |
US8567246(B2) |
申请公布日期 |
2013.10.29 |
| 申请号 |
US20100979960 |
申请日期 |
2010.12.28 |
| 申请人 |
SHAEFFER DEREK;CAGDASER BARIS;LO CHIUNG C.;SEEGER JOSEPH;INVENSENSE, INC. |
发明人 |
SHAEFFER DEREK;CAGDASER BARIS;LO CHIUNG C.;SEEGER JOSEPH |
| 分类号 |
G01C19/56 |
主分类号 |
G01C19/56 |
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