Piezo-acoustic thin film resonator having a crystalline zinc oxide layer

摘要

A capacitor structure includes a lower electrode layer disposed on a substrate, an upper electrode layer and a crystalline zinc oxide-containing dielectric layer interposed between the electrode layers. The amorphous dielectric intermediate layer is interposed between the lower electrode layer and the crystalline zinc oxide-containing dielectric layer. A method for producing the aforementioned capacitor structure is also disclosed. The amorphous dielectric layer is adapted to produce during deposition of the zinc oxide an electrical field which is tipped in relation to the normal to the surface of the substrate surface or the lower electrode layer. The zinc oxide monocrystals grow at an angle, thereby providing a crystalline dielectric layer that can be induced to shear vibrations.