| 摘要 |
PURPOSE: An ITO(Indium Tin Oxide) target and a manufacturing method thereof are provided to improve sintering quality by causing stable heating at high temperatures by using a hybrid heating source. CONSTITUTION: A manufacturing method of an ITO target comprises: a powder mixing step of wet-mixing In2O3 powder and SnO2 powder to form a granule powder; a molding step of molding the granule powder to form an ITO molded product; a sintering step of sintering the ITO molded product to form an ITO sintered product by using a hybrid heating source, which consists of microwaves and MoSi2 heating body, as a sintering heating source. The sintering step consists of a delipidating process and a sintering process. In the delipidating step, microwaves are used as a heating source and in the sintering process, MoSi2 heating body uses as a MoSi2 heating body. The delipidating process and the sintering process are continuously processed in a furnace where a microwave generator and the MoSi2 heating body are installed. |
