发明名称 |
Temperature stabilitized MEMS |
摘要 |
A semiconductor device with temperature control system. Embodiments of the device may include a MEMS chip including a first heater with a dedicated first temperature control loop and a CMOS chip including a second heater with a dedicated second temperature control loop. Each control loop may have a dedicated temperature sensor for controlling the thermal output of each heater. The first heater and sensor are disposed proximate to a MEMS device in the MEMS chip for direct heating thereof. The temperature of the MEMS chip and CMOS chip are independently controllable of each other via the temperature control loops.
|
申请公布号 |
US8569808(B1) |
申请公布日期 |
2013.10.29 |
申请号 |
US201213441134 |
申请日期 |
2012.04.06 |
申请人 |
CHEN TUNG-TSUN;CHU CHIA-HUA;LIN CHUNG-HSIEN;HUANG JUI-CHENG;TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
CHEN TUNG-TSUN;CHU CHIA-HUA;LIN CHUNG-HSIEN;HUANG JUI-CHENG |
分类号 |
H01L29/66 |
主分类号 |
H01L29/66 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|