发明名称 Nonvolatile memory device and method for manufacturing same
摘要 A nonvolatile memory device includes: at least one first interconnection extending in a first direction; at least one second interconnection disposed above the first interconnection and extending in a second direction nonparallel to the first direction; a memory cell disposed between the first interconnection and the second interconnection at an intersection of the first interconnection and the second interconnection and including a memory element; and an element isolation layer disposed between the memory cells. At least one dielectric film with a higher density than the element isolation layer is disposed on a sidewall surface of the memory cell.
申请公布号 US8569731(B2) 申请公布日期 2013.10.29
申请号 US20100726743 申请日期 2010.03.18
申请人 KONNO TAKUYA;FUKUMIZU HIROYUKI;NISHITANI KAZUHITO;KABUSHIKI KAISHA TOSHIBA 发明人 KONNO TAKUYA;FUKUMIZU HIROYUKI;NISHITANI KAZUHITO
分类号 H01L47/00 主分类号 H01L47/00
代理机构 代理人
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