发明名称 |
Measurement system with thickness calculation and method of operation thereof |
摘要 |
A method of operation of a measurement system includes: providing a specimen having a film; controlling a beam generator to direct a charged particle beam into the specimen; detecting a reference signal emitted from the specimen; normalizing the reference signal to create a film L-ratio; and determining a thickness of the film by correlating the film L-ratio to a calibration curve. |
申请公布号 |
US8569692(B1) |
申请公布日期 |
2013.10.29 |
申请号 |
US201213714368 |
申请日期 |
2012.12.13 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
LIU BIAO;WANG CHIKUANG;URITSKY YURI |
分类号 |
G21K7/00 |
主分类号 |
G21K7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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