发明名称 |
CAPACITOR, SEMICONDUCTOR DEVICE INCLUDING THE SAME, METHOD OF FORMING A CAPACITOR AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME |
摘要 |
PURPOSE: A capacitor with high capacitance, a semiconductor device including the same, a method for forming the capacitor, and a method for manufacturing the semiconductor device using the same are provided to increase the area of a bottom electrode by removing a seed forming process when the bottom electrode with a hemispherical pattern is formed. CONSTITUTION: A bottom electrode (180) has a curved surface. An interlayer dielectric layer (110) is arranged between a substrate (100) and the bottom electrode. A first seed (174) is formed on the sidewall of the bottom electrode and has a shape which corresponds to the curved surface of the bottom electrode. A dielectric layer (190) is arranged on the bottom electrode and covers the first seed. A top electrode (200) is arranged on the dielectric layer. |
申请公布号 |
KR20130118094(A) |
申请公布日期 |
2013.10.29 |
申请号 |
KR20120041004 |
申请日期 |
2012.04.19 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
JUN, JONG RYUL |
分类号 |
H01L27/108;H01L21/8242 |
主分类号 |
H01L27/108 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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