发明名称 CAPACITOR, SEMICONDUCTOR DEVICE INCLUDING THE SAME, METHOD OF FORMING A CAPACITOR AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME
摘要 PURPOSE: A capacitor with high capacitance, a semiconductor device including the same, a method for forming the capacitor, and a method for manufacturing the semiconductor device using the same are provided to increase the area of a bottom electrode by removing a seed forming process when the bottom electrode with a hemispherical pattern is formed. CONSTITUTION: A bottom electrode (180) has a curved surface. An interlayer dielectric layer (110) is arranged between a substrate (100) and the bottom electrode. A first seed (174) is formed on the sidewall of the bottom electrode and has a shape which corresponds to the curved surface of the bottom electrode. A dielectric layer (190) is arranged on the bottom electrode and covers the first seed. A top electrode (200) is arranged on the dielectric layer.
申请公布号 KR20130118094(A) 申请公布日期 2013.10.29
申请号 KR20120041004 申请日期 2012.04.19
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 JUN, JONG RYUL
分类号 H01L27/108;H01L21/8242 主分类号 H01L27/108
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