发明名称 THERMAL SPRAYED MEMBER AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a thermal sprayed member in which a film made of an Si substrate material can be provided on a surface of the substrate with a complex geometry, and a method for manufacturing the same.SOLUTION: A thermal sprayed member includes a substrate and a sprayed film coating a surface of the substrate and containing metallic Si or a mixture of metallic Si and any of SiC, SiN, or SiOas a principal component, wherein the relative density of the sprayed film is 90-97 [%]. When raw material powder is thermal sprayed onto the substrate, a combination of an acceleration energy x [g/min/mm] and a thermal energy y [kJ/kg] is adjusted to be within a predetermined range in an x-y plane.
申请公布号 JP2013221169(A) 申请公布日期 2013.10.28
申请号 JP20120092457 申请日期 2012.04.13
申请人 NIHON CERATEC CO LTD 发明人 SAKAMAKI MAKOTO;KAMEYAMA HIROKI
分类号 C23C4/04;H01L21/3065 主分类号 C23C4/04
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