| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer device capable of transferring a substrate stably to a predetermined position.SOLUTION: A substrate 1 supported by a support part 8b at an initial position SP is transferred to a transfer position TP of the same height as that of the support part. The substrate transfer device includes a holding part HJ for holding the transfer position side edge part 1T of the substrate in cantilever, and a hold control unit CONT for moving the holding part holding the edge part toward the transfer position at such a height that the edge part is separated upward from the support part, so that a part of the substrate closer to the initial position side than the edge part maintains the same height as the support part. |
