发明名称 LIQUID INJECTION HEAD, LIQUID INJECTION DEVICE, AND ACTUATOR
摘要 PROBLEM TO BE SOLVED: To provide a liquid injection head capable of making a liquid injection characteristic uniform while restraining breakage of a piezoelectric layer constituting a piezoelectric element, a liquid injection device, and an actuator.SOLUTION: A third electrode 90 is provided on a second electrode 80 constituting a piezoelectric element 300 to cover a region opposed to a pressure generation chamber 12, and plural groove sections 95 extending a parallel direction of the pressure generation chamber 12 are provided at a portion of the third electrode 90 opposed to the pressure generation chamber 12.
申请公布号 JP2013222742(A) 申请公布日期 2013.10.28
申请号 JP20120091652 申请日期 2012.04.13
申请人 SEIKO EPSON CORP 发明人 YAZAKI SHIRO
分类号 H01L41/09;B41J2/045;B41J2/055;H01L41/08;H01L41/18;H01L41/187 主分类号 H01L41/09
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