SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND MANUFACTURING METHOD OF SOLAR CELL

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing apparatus which prevents substrates housed in a substrate housing container from sticking to each other when the substrate housing container is taken up from a substrate process liquid.SOLUTION: A substrate processing apparatus includes at least: a processing tank 10 holding a substrate process liquid 18 in which substrates 11 are immersed; a dryer drying the substrates 11 to which the substrate process liquid 18 adheres; and a transfer device which holds and transfers the substrate housing container 12 in which the multiple substrates 11 are housed and carries in/out the substrate housing container 12 to/from the processing tank 10 and the dryer. The transfer device has separators 40 each of which is inserted into an area between the adjacent substrates 11, 11 and secures a space between the substrates 11, 11 when the transfer device holds the substrate housing container 12.