| 摘要 |
PROBLEM TO BE SOLVED: To form a surface electrode ensuring excellent coverage for irregularities of a Schottky contact, and having an optimum reflectance for image recognition such as positioning.SOLUTION: On the front surface of an SiC substrate 11, a layer containing any one metal out of titanium, tungsten, molybdenum, and chromium is formed, and then the layer is heated thus forming a Schottky electrode 16 on the SiC substrate 11. A surface electrode 17 is formed of aluminum or aluminum containing silicon on the surface of the Schottky electrode 16. When forming the surface electrode 17, excellent coverage for irregularities of the Schottky electrode 16 is ensured by heating at 100°C-500°C, and the surface electrode 17 has a reflectance suitable for image recognition of an automatic wire bonding device. |
