METHOD FOR PRODUCING POLYMER, METHOD FOR PRODUCING RESIST COMPOSITION, AND METHOD FOR PRODUCING SUBSTRATE WITH PATTERN FORMED THEREON

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a polymer, by which variation among lots of the polymer can be further reduced.SOLUTION: A method for producing a polymer includes: a polymerization step of polymerizing a monomer in a reaction liquid comprising a polymerization solvent, the monomer and a polymerization initiator in a reaction vessel; and a reaction termination step of terminating the polymerization reaction. The method also includes a monomer supply step of continuously supplying or dropping the monomer into the reaction vessel in a polymerization reaction period from a time when the polymerization reaction is started to a time when a termination operation is started. The content of the monomer in the reaction liquid in a monomer supply period from the start to the end of the monomer supply step is controlled to 2 to 16 mass%.