| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional measurement method which, if a fulcrum being a rotation center of a probe is shifted in a horizontal direction, calculates an amount of shift of the fulcrum as an error of measurement to correct three-dimensional data in a measurement method for measuring the height and angular variation of the probe.SOLUTION: The three-dimensional measurement method includes a measurement system for detecting a tilt of a stylus 101 and a measurement system for detecting a height of the stylus 101. The measurement system for measuring the height is offset from a fulcrum 106 being the rotation center in a horizontal direction to obtain a distance between the fulcrum and a height measurement position in accordance with the angle and variation in height of the stylus 101, and this distance is confirmed before and after measurement to calculate an amount of shift of the fulcrum 106 in the horizontal direction, and measurement data is corrected. |
