| 摘要 |
PROBLEM TO BE SOLVED: To carry a substrate left in a substrate buffer of a substrate processing unit to the other wafer processing unit when an abnormality occurs in the substrate processing unit.SOLUTION: A substrate processing system 10 includes a plurality of substrate processing units 40A and 40B containing substrate processing modules 40a and 40b respectively, substrate buffers 30a and 30b provided correspondingly to the respective substrate processing units 40A and 40B, and a first substrate carrier 50 for carrying a substrate W in a substrate housing body 20 on a substrate placing stand 25 to the substrate buffers 30a and 30b. When a second substrate carrier 60b in one substrate processing unit 40B breaks down, the substrate W left in the substrate buffer 30b of the substrate processing unit 40B is carried into the substrate buffer 30a of the other substrate processing unit 40A by a substrate displacing device 35. |
