| 摘要 |
In a measurement error correction method and an electronic component characteristic measurement apparatus, for each of correction-data acquisition samples having electrical characteristics different from one another, electrical characteristics SD, ST are measured in a first state in which the correction-data acquisition sample is mounted on a standard fixture and in a second state in which the correction-data acquisition sample is mounted on a test fixture, respectively. For each signal source port of a measurement system including a measuring instrument for measuring electrical characteristics, a mathematical expression that assumes the existence of a leakage signal that is transmitted directly between at least two ports of at least one of the standard fixture and the test fixture is determined. Electrical characteristics of a given electronic component are measured in the second state. By using the determined mathematical expressions, electrical characteristics if measurement were performed in the first state are calculated. |
