| 发明名称 |
SEMICONDUCTOR APPARATUS AND STACKED SEMICONDUCTOR APPARATUS |
| 摘要 |
A semiconductor apparatus includes a TSV formed to be electrically connected with another chip and a TSV test unit configured to check a capacitance component of the TSV to generate a TSV abnormality signal. |
| 申请公布号 |
KR101321480(B1) |
申请公布日期 |
2013.10.28 |
| 申请号 |
KR20110063781 |
申请日期 |
2011.06.29 |
| 申请人 |
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发明人 |
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| 分类号 |
H01L21/60;H01L21/66;H01L23/48 |
主分类号 |
H01L21/60 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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