| 摘要 |
PURPOSE: A shutter for semiconductor manufacturing equipment is provided to close the gateway of a process chamber by preventing a gap from being generated between a shutter board and the gateway. CONSTITUTION: A shutter board (110) opens or closes the gateway of process chamber. A connecting piece (120) is horizontally extended to one side of the shutter board. A combining piece (130) is combined with the lower part of the connecting piece. A guide piece (140) guides the connecting piece and the combining piece. A combining bolt (150) combines the connecting piece and the combining piece. A bolt (160) for combining with an actuator combines the combining piece with a linear actuator. |
