| 摘要 |
PROBLEM TO BE SOLVED: To form a wall having a large tapered angle of a wall side face and a large aspect ratio and to form an insulating and flattening film between walls in the manufacture of a liquid crystal display device employing a wall electrode system.SOLUTION: A method for manufacturing a liquid crystal display device is provided, wherein the liquid crystal display device includes a plurality of pixels arranged in a matrix, each pixel having a wall structure formed of an insulating material on a pixel boundary and having a wall electrode on at least a side face of the wall structure. In the method, the wall structure is formed by using a chemically amplified resist as a material for the wall structure and formed through steps of applying the chemically amplified resist, exposing and developing the chemically amplified resist, irradiating the entire surface of the resist with light for post exposure, preliminarily baking the resist at a temperature lower than a temperature of actual baking, and actually baking the resist at a temperature higher than the preliminary baking. |
