SCALE FOR SURFACE REFLECTION TYPE ENCODER, METHOD FOR MANUFACTURING THE SAME, AND SURFACE REFLECTION TYPE ENCODER

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a scale for surface reflection type encoders dispensing with complicated processes such as resist exposure, image development and etching processes, inexpensively forming highly accurate phase grating in a high productive manner, and capable of accommodating to elongated products.SOLUTION: The method for manufacturing a scale for surface reflection type encoders includes: a masking film forming step of forming a masking film on a phase grating pattern forming area of a base material for scales; a laser light processing step of partially removing the masking film by applying laser light and forming a phase grating forming section; a phase grating forming step of forming a phase grating on the phase grating forming section by plating processing; a masking film removing step of removing the masking film; and a protective film laminating step of superposing a transparent protective film on the phase grating pattern forming area.