| 摘要 |
FIELD: physics.SUBSTANCE: method of leading a probe to a sample for a scanning probe microscope involves carrying out steps where there is alternation of the operating mode of the leading motor with a fully retracted scanner and a mode for advancing the scanner with an inactive leading motor until, during one of the steps of advancing the scanner, the tip of the probe is close to the sample. At the steps of advancing the scanner, the scanner is controlled by a feedback circuit; the operating point of the feedback circuit at each step of advancing the scanner gradually changes, starting with the value of the input signal of the feedback circuit at the beginning of that step, such that the feedback, while moving the scanner, starting with a completely retracted state, produces said changes until the scanner is completely advanced or the tip of the probe is near the sample. The probe used is a power probe with an optical recording system. During the leading process, vibrations are generated in the cantilever of the power probe, and the proximity of the tip of the probe to the sample is determined from an abrupt jump of the oscillation phase signal.EFFECT: reducing the degree of destructive action on an analysed sample, high measurement accuracy.10 cl, 7 dwg |
