| 摘要 |
FIELD: machine building.SUBSTANCE: unit cylindrical vacuum chamber 1 has loading door 11 equipped with flange joints for mounting of process modules 4, 5, 6, 7, 8. Unit Incorporates gas feed system, exhaust system supply sources and control unit. Besides, it comprises rotary mount for parts to be processed. Unit process modules may be composed of at least one elongated vacuum-arc generator of metal plasma, elongated generator of gas plasma, medium-frequency dual magnetron, metal ion source and gas ion source. Besides, it comprises shift voltage source to support ion implantation and/or coat deposition.EFFECT: complex surface processing including surface purification and activation, application of various coats, modification of surface by metal and gas plasma.17 cl, 2 dwg, 1 tbl, 1 ex |
