| 摘要 |
A robot for transferring a substrate is provided to improve the mobility and to increase the productivity by forming plural arms capable of horizontally rotating and vertically moving. A robot for transferring a substrate comprises a main shaft(201), plural arms(202), a hand part(203), and a control part(204). The plural arms connected to the main shaft are vertically moved and horizontally rotated. The hand part formed at the terminal end of the plural arms mounts the substrate. The control part controls the up and down movement and the horizontal rotation of the plural arms. The main shaft has a base part(205) for supporting the main shaft at the lower part. The plural arms are connected the main shaft at the other heights. A first joint part(202c) formed on the connected portion of the arm with the main shaft is horizontally rotated and vertically moved around the main shaft. |
