TWO-PROBE SYSTEM FOR MEASUREMENT OF ELECTRIC CHARACTERISTICS AND CONTROL OF CONTINUITY OF SUPER-THIN CONDUCTIVE FILMS

摘要

A two-probe system for measurement of electric characteristics and control of continuity of super-thin conductive films on semiconductor and insulating substrates relates to micro- and nanoelectronics. The system includes the object stage that consists of two sections where through coaxial cuts are provided, and a frame with micrometric screws, at that the lower section of the stage is installed on the frame, and the upper one can move in vertical direction with respect to the lower one along the guides; two autonomous systems for control of the probes; two needle probes that have spiral springy sections and micrometric tip; electric circuit for connection of the probes for study of volt-ampere characteristics, this comprises the power supply source, digital voltmeter and current meter. The system is intended for evaluation of conductive properties of thin-film coatings, determination of electric properties of contact of the conductive film and the insulating substrate, and the level of structuring (continuity) of the film.