DEVICE FOR DETECTING FLUCTUATION IN MOISTURE CONTENT, METHOD FOR DETECTING FLUCTUATION IN MOISTURE CONTENT, VACUUM GAUGE, AND METHOD FOR DETECTING FLUCTUATION IN VACUUM DEGREE

摘要

The present invention is capable of continuously detecting variations in moisture content or wide bands of pressure fluctuations without a switching operation even when there is a significant variation in moisture content or pressure in a measurement space. A moisture content fluctuation detection device (100) is provided with a silica aerogel (104) disposed so as to be exposed in a measurement space, and a detection unit (103) for detecting moisture content fluctuations in the measurement space, wherein the detection unit (103) has: a light source (111) for irradiating light, having a wavelength region that is at least a portion of the range 1850 nm to 1970 nm, to the silica aerogel (104); a light receiving unit (110) for receiving light, within the light passed through the silica aerogel (104), having a wavelength region that is at least a portion of the range 1850 nm to 1970 nm; and a computation unit (114) for computing the fluctuation in moisture content in the measurement space, using the change in the intensity of the light received by the light receiving unit (110).