| 摘要 |
PROBLEM TO BE SOLVED: To provide a vapor growth device which can be smoothly installed on a chamber side, and is equipped with a susceptor facilitating maintenance.SOLUTION: A vapor growth device 1 includes: a chamber body 3; and a rotation/revolution type susceptor 7 detachably installed in the chamber body 3, and on which a plurality of substrates 5 are placed. The vapor growth device 1 has a rotation mechanism 9 rotating the susceptor 7 while the susceptor 7 is installed in the chamber body 3. The susceptor 7 includes: a disc-shaped susceptor body 11; a center fixed gear 13 provided at a center part of the susceptor body 11, capable of relatively rotating to the susceptor body 11, and fixed on the chamber body 3 side when the susceptor 7 is installed in the chamber body 3; and a plurality of substrate placing portions (a substrate plate 15 and a substrate plate gear 17) installed so as to surround the periphery of the center fixed gear 13, formed with gears meshed with the center fixed gear 13, and capable of rotating while placing the substrates 5 thereon. |
